平面螺旋線圈匝數(shù)對(duì)微型ICP激發(fā)源的啟燃入射功率的影響

電氣自動(dòng)化論文編號(hào):ZD316  論文字?jǐn)?shù):9773,頁(yè)數(shù):22

目    錄

 一、引言…………………………………………………………….1
 1.1  研究目的及意義……………………………………………………1
 1.2  微型ICP的研究現(xiàn)狀………………………………………………1
 1.3  論文主要內(nèi)容………………………………………………………4
 二、ICP激發(fā)源………………………………………………………...5
 2.1  ICP激發(fā)源………………………………………………………….5
 2.2  微型ICP激發(fā)源的原理及等效電路………………………………6
 2.3  微型ICP激發(fā)源的結(jié)構(gòu)……………………………………………7
 2.3.1  射頻功率驅(qū)動(dòng)電路模塊………………………………………….7
 2.3.2  激發(fā)放電室組件………………………………………………….8
 三、平面螺旋線圈……………………………………………………..9
 3.1  立體結(jié)構(gòu)螺旋線圈………………………...……………………….9
 3.2  平面結(jié)構(gòu)螺旋線圈…………………………..………….………….9
 3.3  平面螺旋線圈電感量的計(jì)算……………………..…….………….10
 3.4  平面螺旋線圈的加工………………………………..……….…….11
 四、儀器設(shè)備及實(shí)驗(yàn)…………………………………………………..12
 4.1  實(shí)驗(yàn)儀器設(shè)備………………………………………………………12
 4.2  實(shí)驗(yàn)方法……………………………………………………………12
 4.3  實(shí)驗(yàn)數(shù)據(jù)及結(jié)論……………………………………………………13
 4.3.1  外徑10mm的平面螺旋線圈匝數(shù)與射頻功率的關(guān)系………….14
 4.3.2  外徑15mm的平面螺旋線圈匝數(shù)與射頻功率的關(guān)系………….15
 4.4  實(shí)驗(yàn)結(jié)果分析………………………………………………………15
 五、結(jié)論………. ……………………………………………………….16
 謝辭 …………………………………………………………………….17
 參考文獻(xiàn)………………………………………………………………..18

摘    要

 在物質(zhì)成分分析中光譜分析儀器是重要的檢測(cè)手段之一，而激發(fā)光源是光譜儀器的重要組成部件之一。電感耦合等離子體（Inductively Coupled Plasma，ICP）激發(fā)源因諸多優(yōu)點(diǎn)而在光譜儀中得到廣泛應(yīng)用。本文簡(jiǎn)要敘述了ICP激發(fā)源的裝置和原理，介紹了國(guó)內(nèi)外微型ICP激發(fā)源的研究現(xiàn)狀，圍繞微型ICP激發(fā)源微電路組件中的關(guān)鍵元件——平面螺旋線圈做了測(cè)試研究。采用13.56MHz的射頻功率電源，實(shí)驗(yàn)測(cè)試了平面螺旋線圈外徑分別為10mm和15mm時(shí)，匝數(shù)（選取3、4.、5匝）與啟燃/維持射頻功率之間的關(guān)系，給出了實(shí)驗(yàn)測(cè)試數(shù)據(jù)。實(shí)驗(yàn)測(cè)試結(jié)果表明：對(duì)于外徑為10mm的平面螺旋線圈，3匝時(shí)啟燃功率具有最小值（9.5W），5匝時(shí)所需的維持功率具有最小值（0.8W）；對(duì)于外徑為15mm的平面螺旋線圈，3匝時(shí)啟燃功率和維持功率都具有最小值，分別為6.8W和0.8W。

關(guān)鍵詞：光譜儀  微型ICP激發(fā)源  平面螺旋線圈   啟燃入射功率  匝數(shù)

The Turn of Planar Spiral-shaped Coil Influence on The Ignition Forward Power about Micro ICP
ABSTRACT

 In detecting the chemical composition of materials, the Optical Spectrometer is one of the most important methods. Excitation source is an important functional component of the Optical Emission Spectrometer (OES). With the inductively coupled plasma (ICP) has a great many merits, it is always applied to OES. In this paper maked a summary of mICP source of its devices and principles. The research and application status of mICP in this time at home and abroad is described briefly. The parameter optimization of microcircuit module is the number of the turn of the planar spiral-shaped coil. When the radio frequency supply power is 13.56MHz, the external diameter is 10 mm and 15 mm, perform the experiment with the relationship between the number of the turn(3,4,5 is selected) and igniting/maintaining power of the mICP source. And the data of the experiment is obtained. The result of this experiment indicate that :For the external diameter is 10 mm, when the number of the turn is 3, the igniting power reach the minimum value(9.5W); when the number of the turn is 5, the maintaining power reach the minimum value(0.8W). For the external diameter is 10 mm, when the number of the turn is 3 the igniting power and the maintaining power both reach the minimum value, separately is 6.8 W and 0.8W.
 
 Key words: spectrometer  mICP source  planar spiral-shaped coil  ignition forward power turn