利用吸收法測量薄膜厚度

應用物理學論文編號:WLX025  字數:8750,頁數:19 

目錄
摘    要 i
Abstract ii
目錄 iii
第一章   緒論 1
1.1研究動機與目的 1
1.2 納米金屬膜的研究 1
1.3 內容概述 2
第二章 測量薄膜厚度的方法 3
2.1 橢圓偏振法 3
2.2 微量天平法 3
2.3 石英晶體振蕩法 3
2.4 電阻法 4
2.5 電容法 4
2.6 表面粗糙度儀法 4
2.7 其它測量薄膜的方法 5
第三章  薄膜光學的基本理論 7
3.1 薄膜中的折射定律 7
3.2 均勻薄膜對光的反射及透射 7
3.2.1 反射 7
2.2.2 透射 8
第四章 薄膜厚度測量 10
4.1 實驗設計 10
4.2 實驗數據 11
4.3 實驗結果分析 12
第五章  結論 14
致謝 15
參考文獻 16

摘    要
 金屬薄膜的物性及特性研究始終是關注的熱點。對于金屬薄膜而言，膜薄厚度是一個非常重要的特征尺寸，直接影響薄膜的使用特性，而幾乎所有的薄膜特性又都與膜厚有關，尤其是厚度較小的薄膜，其特性還將出現明顯的尺寸效應，所以膜厚的測量變得尤為重要。本文先介紹了有關薄膜背景和應用領域等方面。本論文最主要的是利用了光的吸收法來測量薄膜透射與膜厚的關系，從而來計算一些同材料的膜厚。具體地來說，對于不同厚度的薄膜，其對于光的吸收也會有一定的變化，也就是利用薄膜對光強的吸收特性。通過實驗來得出光的透射率與薄膜厚度的關系，也就是光源通過薄膜所產生的衰減與薄膜厚度呈一定的關系，利用這種關系可以對薄膜厚度進行測量。
關鍵詞：吸收、膜厚、透射率、厚度測量

Abstract
 The study of character of metal film is a hotspot all the time. For metal film the most important characteristic dimension is film thickness which directly affect the service performance of the film thickness, and almost all the service performance is relevant to its thickness, especially the film with thin thickness, its size effect will be apparent. Therefore, the measurement of film thickness become more important. At first, background and apply field of film are introduced. In order to measure the thickness, how to produce the film is significant. Different kinds of ways to produce film are introduced next. This article is mainly about the measurement of film thickness based on its absorption characteristic of light intensity. Actually, the relation between transimision and film thickness can be measured by experiments. Attenuation caused by the lamp-house passing through the film is relevant to its thickness, so film thickness will be measured according to this relation.
Keywords: absorb、film thickness、transmissivity、thickness measurement