微小位移電渦流傳感器的研究

機(jī)械設(shè)計(jì)制造及其自動(dòng)化論文，論文編號(hào):JX1101  論文字?jǐn)?shù):13026.頁(yè)數(shù):55

摘   要
 電渦流傳感器能夠靜態(tài)和動(dòng)態(tài)的非接觸、高線性度、高分辨力地測(cè)量被測(cè)金屬導(dǎo)體距探頭表面的距離。電渦流傳感器能準(zhǔn)確測(cè)量被測(cè)體（必須是金屬導(dǎo)體）與探頭端面之間靜態(tài)和動(dòng)態(tài)的相對(duì)位移變化。在高速旋轉(zhuǎn)機(jī)械和往復(fù)式運(yùn)動(dòng)機(jī)械的狀態(tài)分析，振動(dòng)研究、分析測(cè)量中，對(duì)非接觸的高精度振動(dòng)、位移信號(hào)，能連續(xù)準(zhǔn)確地采集到轉(zhuǎn)子振動(dòng)狀態(tài)的多種參數(shù)。電渦流傳感器系統(tǒng)廣泛應(yīng)用于電力、石油、化工、冶金等行業(yè)和一些科研單位。對(duì)汽輪機(jī)、水輪機(jī)、鼓風(fēng)機(jī)、壓縮機(jī)、空分機(jī)、齒輪箱、大型冷卻泵等大型旋轉(zhuǎn)機(jī)械軸的徑向振動(dòng)、軸向位移、鍵相器、軸轉(zhuǎn)速、脹差、偏心、以及轉(zhuǎn)子動(dòng)力學(xué)研究和零件尺寸檢驗(yàn)等進(jìn)行在線測(cè)量和保護(hù).
 本論文從電渦流傳感器的基本測(cè)量原理出發(fā)，采用有限元方法，通過建模、定義材料特性、劃分網(wǎng)格、設(shè)置邊界條件、加載及求解等，對(duì)電渦流傳感器的電磁場(chǎng)進(jìn)行仿真研究。
 本論文的主要內(nèi)容：
介紹傳感器的發(fā)展，背景以及本次論文的選題。
電渦流傳感器結(jié)構(gòu)和原理介紹。
通過有限元仿真得出，檢測(cè)線圈形狀變化，被測(cè)體磁導(dǎo)率變化和檢測(cè)線圈與被測(cè)體之間位置變化對(duì)電渦流傳感器的影響。
有限元仿真避免復(fù)雜的計(jì)算，對(duì)電渦流傳感器的設(shè)計(jì)有重要意義。
關(guān)鍵詞：電渦流傳感器 有限元  靈敏度 線性度 電磁場(chǎng)

Abstract
 
 Eddy current sensor can be static and dynamically non-contact, high linearity, high resolution measurement of metal conductor measured distance from the probe surface. It is a non-contact linear measuring tool. Eddy current sensor can be measured accurately measure body (must be a metal conductor) and the static and dynamic between the probe end relative displacement. High-speed rotating machinery and reciprocating motion mechanical state analysis, vibration study, analytical measurement, the pair of high-precision non-contact vibration, displacement signal, can be collected continuously and accurately to the rotor vibration state of the various parameters.Eddy current sensor system is widely used in electric power, petroleum, chemical, and metallurgical industries and some scientific research units. On the turbine, turbine, blower, compressor, air extension, gear boxes, large cooling pumps and other large rotating machinery shaft radial vibration, axial displacement, the key phase detector, shaft speed, differential expansion, eccentricity, and rotor dynamics and parts dimensional inspection, etc. online measurement and protection.
 This paper from the basic eddy current sensor measuring principle, it applied the finite element method, through modeling, the definition of material properties, meshing, set the boundary conditions, loading and solving, etc., on the eddy current sensor for electromagnetic field simulation.
 The main contents of this paper:
 1.Describes the development of the sensor, the background and the topics of this paper.    2.Structure and principle of eddy current sensor description.    3.Obtained by finite element simulation, testing coil shape changes, the measured changes in the magnetic permeability and the detection coil and the measured changes in body position between the eddy current sensor.    4.Finite element simulation to avoid complicated calculations, on the design of eddy current sensor is important.
 Keywords: Eddy current sensors   element  sensitivity   linear degrees electromagnetic field
目錄
 
摘   要 I
Abstract II
目錄 IV
第一章  緒論 1
1.1引言 1
1.2傳感器的發(fā)展情況 1
1.3課題的選擇 3
1.3.1 選題的背景及意義 3
1.3.2研究的基本內(nèi)容與擬解決的主要問題 3
1.3.3研究的方法與技術(shù)路線 3
第二章 電渦流傳感器的結(jié)構(gòu)和原理 4
2.1電渦流傳感器介紹 4
2.2電渦流傳感器的基本工作原理及電路圖 5
2.2.1電渦流傳感器的工作原理 5
2.2.2電渦流傳感器的等效電路圖 6
2.3電渦流傳感器的分類 7
2.4電渦流式位移傳感器主要技術(shù)指標(biāo) 8
第三章 電渦流傳感器的仿真及Quickfield介紹 11
3.1有限元的定義 11
3.1.1有限元的特點(diǎn) 11
3.1.2有限元常用術(shù)語(yǔ) 12
3.2 Quickfield的介紹 12
3.2.1 Quickfield的應(yīng)用領(lǐng)域 13
3.2.2QuickField的特征 13
3.2.3 Quickfield的應(yīng)用模塊 13
3.3電渦流傳感器選擇及主要結(jié)構(gòu)確定 15
3.3.1電渦流傳感器的選擇 15
3.3.2檢測(cè)線圈的選擇 16
3.3.2反射體的設(shè)計(jì) 17
3.3.3定義材料特性 17
3.4線圈形狀變化的仿真 18
3.4.1有限元仿真過程 18
3.4.2仿真結(jié)果 21
3.4.3結(jié)論 26
3.5對(duì)于電渦流傳感器檢測(cè)線圈與被測(cè)體距離變化的仿真 26
3.5.1用Quickfield進(jìn)行仿真 26
3.5.2結(jié)果 37
3.6.被測(cè)體磁導(dǎo)率變化的仿真 37
3.6.1分別對(duì)五組參數(shù)進(jìn)行仿真計(jì)算 37
3.6.2結(jié)果 48
第四章   結(jié)論 49
參考文獻(xiàn) 50
致 謝 51